Method and system for generating soft sensor technical data based on a diffusion model

A method for generating soft-sensor technical data based on a diffusion model, characterized by comprising the following steps:

• (1) collecting data from a wafer manufacturing process, the data comprising process data and metrology data obtained from key semiconductor manufacturing steps, and utilizing the collected process data and metrology data to form a training set;
• (2) iteratively training a regression-enhanced diffusion model using said training set;
• The regression-enhanced diffusion model includes a diffusion noise-adding module, a reverse denoising module, and a regression enhancement module incorporating a multi-head attention mechanism. The diffusion noise-adding module is operative to incrementally introduce random noise to process data within the training set, thereby producing pure Gaussian noise data. The reverse denoising module is operative to progressively denoise and reconstruct the pure Gaussian noise data to generate virtual process data. The regression enhancement module is operative to:
• generate virtual metrology data utilizing both actual process data and the virtual process data;
• and update parameters of the regression-enhanced diffusion model based on a loss function that includes a measurement loss between the virtual metrology data and actual metrology data, a reverse denoising loss, and a Lipschitz constraint loss.
• Throughout iterative training of the regression-enhanced diffusion model, the training set is refreshed following each training iteration by:
• dividing the virtual process data produced by the reverse denoising module into virtual sample subsets;
• choosing selected virtual sample subsets according to non-dominated sorting outcomes and crowding distance evaluations;
• and integrating the chosen virtual sample subsets into the training set.
• (3) Virtual process data is generated by inputting random Gaussian noise into the reverse denoising module of the trained regression-enhanced diffusion model, wherein said generated virtual process data serves as soft sensor technology data for key semiconductor manufacturing steps.