Gas measurement device
AssigneeAsahi Kasei Microdevices Corporation
InventorsYuta Takagi, Yuji Goda, Keiichiro Kuwata
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AssigneeAsahi Kasei Microdevices Corporation
InventorsYuta Takagi, Yuji Goda, Keiichiro Kuwata
Estimating the term…
A gas measurement device includes: a reflection part, reflecting irradiation light having a wavelength range of 2.5 μm or more and 3.5 μm or less and forming a detection space for a target gas; a reception part, generating a detection signal corresponding to an intensity at which the irradiation light is absorbed by the target gas; a calculation part, generating concentration information of the target gas based on the detection signal; and a heating part, heating the reflection part. The reflection part includes a metal portion containing aluminum and a protective film containing silicon. The calculation part acquires the detection signal and a heating state of the heating part as input information, and performs data acquisition for calibration according to the heating state.
A gas measurement device comprising:
Dependencies are inferred from the claim text.