Method for producing semiconductor device and laminated body for temporary fixing
AssigneeResonac Corporation
InventorsEmi MIYAZAWA, Yuta AKASU, Shinya KAWASHITA, Tetsuya ENOMOTO, Takashi KAWAMORI
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AssigneeResonac Corporation
InventorsEmi MIYAZAWA, Yuta AKASU, Shinya KAWASHITA, Tetsuya ENOMOTO, Takashi KAWAMORI
Estimating the term…
A method for producing a semiconductor device includes preparing a laminated body including a support member, a light absorption layer, and a temporary fixing material layer containing a cured product of a thermosetting resin component from the support member and temporarily fixing the semiconductor member to the support member via the light absorption layer and the temporary fixing material layer. A push-in depth when on the surface of the temporary fixing material layer on a side where the semiconductor member is disposed, a nanoindentation method using a Berkovich indenter is performed under a condition of 25° C. such that a load is increased at a loading rate of 20 μN/second for 5 seconds, retained at 100 μN for 2 seconds after the load reaches 100 μN, and decreased at an unloading rate of 20 μN/second for 5 seconds until the load is 0 mN is 600 nm or more.
A method for producing a semiconductor device, comprising:
A laminated body for temporary fixing used to temporarily fix a semiconductor member and a support member, comprising:
Dependencies are inferred from the claim text.