Method of manufacturing a microstructure
OwnerAnthony O'HARA, David ANDERSON +1inventors
InventorsAnthony O'HARA, David ANDERSON, Toni SANDBRINK-KOBLENZ
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Abstract
A method of manufacturing a microstructure a microstructure with a three-dimensional structure is described. The method comprises performing an isotropic vapour etch of a sacrificial material. The etch parameters of the isotropic vapour etch are varied as a function of time responsive to (or based on) prior knowledge of the microstructure. The method has numerous advantages as can more efficiently create microstructures whilst minimising the risk of failure of the device.
Claims25
A method of manufacturing a microstructure,
- the method comprising performing an isotropic vapour etch of a sacrificial material,
- wherein etch parameters of the isotropic vapour etch are varied as a function of time according to a process recipe determined before starting the isotropic vapour etch responsive to prior knowledge of the microstructure, and
- where the process recipe is unchanged during the isotropic vapour etch.
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Dependencies are inferred from the claim text.