Wafer carrier
AssigneeASM IP Holding B.V.
InventorsCornelis Herbschleb, Theodorus G.M. Oosterlaken, Gijsbert Ronner, Klaas Boonstra, Lucian Jdira
Life of this patent
Estimating the term…
Abstract
A wafer boat is disclosed. The wafer boat comprises two side rods and at least one back rod, the rods extending substantially vertically between a top member and a bottom member. The rods comprise vertically spaced apart support formed at corresponding heights, each support extending away from the respective boat rods towards a central axis of the wafer boat. Each support has a wafer support surface for contacting a wafer, the wafer support surface being a polished surface, and each wafer support surface is terminated by two rounded corners.
Claims18
A wafer boat comprising two side rods and at least one back rod, the rods extending substantially vertically between a top member and a bottom member, the rods comprising vertically spaced apart support formed at corresponding heights, each support extending away from the respective boat rods towards a central axis of the wafer boat, wherein each support has a wafer support surface for contacting a wafer, the wafer support surface being a polished surface, and wherein each wafer support surface is terminated by two rounded corners.
Dependencies are inferred from the claim text.