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US 2026/0221403 A1Published application
Magnetic assembly for a sputter ion pump
AssigneeEdwards Vacuum LLC
InventorDerek Alexander Clement
Life of this patent
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Abstract
Magnetic assembly for a sputter ion pump, SIP, comprising a pole piece, at least one magnet connected to the pole piece by a magnetic force of the at least one magnet, at least one cathode element connected to the at least one magnet and at least one bracket element connected to the at least one magnet by the magnetic force of the at least one magnet, wherein the at least one bracket element fixes the position of the at least one cathode element.
Claims14
A magnetic assembly for a sputter ion pump, SIP, comprising:
- a pole piece,
- at least one magnet connected to the pole piece by a magnetic force of the at least one magnet,
- at least one cathode element connected to the at least one magnet and
- at least one bracket element connected to the at least one magnet by the magnetic force of the at least one magnet, wherein the at least one bracket element fixes the position of the at least one cathode element.
1 more element
Dependencies are inferred from the claim text.