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US 2026/0221400 A1Published application
Aligner station with lifting mechanism
AssigneeApplied Materials, Inc.
InventorMichael Carl Hankes
Life of this patent
Estimating the term…
Abstract
An aligner station includes an aligner stage configured to support a carrier for a process kit ring. The aligner station further includes a lift mechanism configured to lift the process kit ring from the carrier. The aligner station, using the aligner stage and the lift mechanism, is configured to independently align the process kit ring and the carrier to a target orientation.
Claims20
An aligner station, comprising:
- an aligner stage configured to support a carrier for a process kit ring;
- and
- a lift mechanism configured to lift the process kit ring from the carrier;
- wherein the aligner station is configured to independently align the process kit ring and the carrier to a target orientation via the aligner stage and the lift mechanism.
1 more element
An aligner, comprising:
- an aligner stage configured to rotate to align a carrier for a replaceable part of a substrate processing system;
- multiple lift pins configured to lift the replaceable part from the carrier;
- and
- a controller, wherein the controller is configured to:
- cause the aligner stage to independently align the replaceable part and the carrier to a target orientation.
2 more elements
A method, comprising:
- determining a first angular orientation error of a process kit ring carrier placed on an aligner stage and a second angular orientation error of a process kit ring carried on the process kit ring carrier;
- and
- causing the aligner stage to correct the first angular orientation error and the second angular orientation error.
Dependencies are inferred from the claim text.