US 2026/0219592 A1 · METHOD AND APPARATUS FOR MEASURING A TOPOGRAPHY OF A SURFACE OF AN OBJECT

Abstract

A method of measuring a topography of a surface of an object, the method includes: forming a first image of a pattern on a beam spot region with a radiation beam; moving the object relative to the beam spot region; receiving a portion of the radiation beam reflected from the object and splitting the reflected radiation into first and second portions such that a first portion of the radiation, which corresponds to a first portion of the first image, is spatially separate from a second portion of the radiation, which corresponds to a second portion of the first image; determining an intensity of the first and second portions of the radiation; and determining a height of the object by combining the intensity of the first portion of the radiation determined at a first time and the intensity of the second portion of the radiation determined at a second time.

Claims20

Dependent claims

A method of measuring a topography of a surface of an object, the method comprising:

forming a first image of a pattern on a beam spot region with a radiation beam;
moving the object relative to the beam spot region;
receiving a portion of the radiation beam reflected from the object and splitting the reflected radiation into first and second portions such that a first portion of the radiation, which corresponds to a first portion of the first image, is spatially separate from a second portion of the radiation, which corresponds to a second portion of the first image;
determining an intensity of the first and second portions of the radiation;
and
determining a height of the object by combining the intensity of the first portion of the radiation determined at a first time and the intensity of the second portion of the radiation determined at a second time.

3 more elements

A non-transitory computer-readable medium comprising instructions therein, the instructions, when executed by a processor system, configured to cause the processor system to at least:

obtain an intensity of first and second portions of radiation, wherein the first and second portions are obtained by formation of a first image of a pattern on a beam spot region with a radiation beam, movement of the object relative to the beam spot region, and splitting of reflected radiation from the object into the first and second portions such that the first portion of the radiation, which corresponds to a first portion of the first image, is spatially separate from a second portion of the radiation, which corresponds to a second portion of the first image;
and
determine a height of the object by combining the intensity of the first portion of the radiation determined at a first time and the intensity of the second portion of the radiation determined at a second time.

Dependencies are inferred from the claim text.

Method and apparatus for measuring a topography of a surface of an object

Life of this patent

Method and apparatus for measuring a topography of a surface of an object

Life of this patent

Abstract

Claims20