Euv mirror, inspection system, mask inspection apparatus, method for examining an euv mirror
OwnerHenri Schottmueller, Soeren Knorr +1inventors
InventorsHenri Schottmueller, Soeren Knorr, Jan Kessler
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Abstract
The invention relates to an EUV mirror comprising a mirror body and a holding component, wherein the holding component is connected to the mirror body by way of an adhesive bond and wherein an optical surface with high reflectivity for EUV radiation is formed on the mirror body. The mirror body consists of a transparent material. The surface of the mirror body comprises a non-transparent surface region and a viewing window. The viewing window provides an observation channel to the adhesive bond. The invention also relates to an inspection system, a mask inspection apparatus and a method for examining an EUV mirror.
Claims20
An EUV mirror, comprising a mirror body and a holding component, wherein the holding component is connected to the mirror body by way of an adhesive bond, wherein an optical surface with high reflectivity for EUV radiation is formed on the mirror body, wherein the mirror body comprises a transparent material, wherein the surface of the mirror body comprises a non-transparent surface region and a viewing window, and wherein the viewing window provides an observation channel to the adhesive bond.
A method for examining an EUV mirror, wherein the EUV mirror comprises a mirror body and a holding component, wherein the holding component is connected to the mirror body by way of an adhesive bond, wherein an optical surface with high reflectivity for EUV radiation is formed on the mirror body, wherein the mirror body consists of a transparent material, wherein the surface of the mirror body comprises a non-transparent surface region and a viewing window, and wherein the adhesive bond is examined by way of an observation channel which extends through the viewing window to the adhesive bond.
Dependencies are inferred from the claim text.