Resist composition, method for forming resist pattern, compound, and acid diffusion control agent
AssigneeTokyo Ohka Kogyo Co., Ltd.
InventorYohei Adachi
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AssigneeTokyo Ohka Kogyo Co., Ltd.
InventorYohei Adachi
Estimating the term…
A resist composition capable of further enhancing sensitivity and roughness reduction, a method for forming a resist pattern using the resist composition, and a compound useful as an acid diffusion control agent used in the resist composition. The resist composition includes a base material component whose solubility in a developing solution is changed by an action of an acid, and a compound represented by General Formula (d0). In the formula, Z represents a monocyclic group of a heterocyclic ring including at least a carbon atom and a nitrogen atom; nz0 represents an integer of 1 or greater; Yd01 represents a single bond or an (nz0+1)-valent linking group; Yd00 represents a single bond or a linking group having 1 to 20 carbon atoms; Xd0 represents an iodine atom or a bromine atom; nxd0 represents an integer of 1 or greater; Rd0 represents a substituent other than Xd0; nrd0 represents an integer of 0 or greater; Mm+ represents an m-valent organic cation; and m represents an integer of 1 or greater.
A resist composition which generates an acid upon light exposure and whose solubility in a developing solution is changed by an action of the acid, the resist composition comprising:
A compound represented by General Formula (d0),
Dependencies are inferred from the claim text.