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US 2026/0219450 A1Published application
Solid state device including an opening over a grating coupler, and method of forming the same
AssigneePsiquantum, Corp.
InventorsVijay SUKUMARAN, Benjamin BRIGGS, Himani KAMINENI
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Abstract
A solid state device includes a waveguide located on a substrate, a grating coupler connected to the waveguide, and a dielectric layer stack including a bottom dielectric layer portion located on the grating coupler and having an opening formed by conductor lift-off over the bottom dielectric layer portion.
Claims20
A solid state device, comprising:
- a waveguide located on a substrate;
- a grating coupler connected to the waveguide;
- and
- a dielectric layer stack including a bottom dielectric layer portion located on the grating coupler and having an opening formed by conductor lift-off located over the bottom dielectric layer portion.
1 more element
A method of forming a solid state device, comprising:
- forming a grating coupler on a substrate;
- forming a dielectric layer stack on the grating coupler, wherein the dielectric layer stack includes a conductor pattern over the grating coupler;
- and
- etching the conductor pattern to lift-off a portion of the dielectric layer stack and form an opening in the dielectric layer stack over the grating coupler.
1 more element
Dependencies are inferred from the claim text.