System and method for automatically loading and testing afm-probes
AssigneeNearfield Instruments B.V.
InventorsHamed SADEGHIAN MARNANI, Wouter Arie DE ZEEUW, Irene BATTISTI
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Abstract
An apparatus (2) is disclosed for automated unloading AFM-probes (10) from a probe package (1) and loading the probes after being individually characterized into a probe cassette (3) for use by an AFM-device. The apparatus comprises: a cantilever characterization station (21) for characterizing a cantilever of individual probes; a tip characterization station (22) for characterizing a tip of individual probes; a probe manipulator (23) to transfer AFM-probes from the probe package (1) to the probe cassette (3).
Claims20
A system for automated unloading AFM-probes from a source probe carrier and loading the probes after being individually characterized into a destination probe carrier for use by an AFM-device, or directly into an AFM-device, wherein each probe of the AFM-probes comprises a cantilever and a tip, the system comprising:
- a cantilever characterization station for characterizing a cantilever of individual probes;
- a tip characterization station for characterizing a tip of individual probes;
- a probe manipulator to transfer AFM-probes to the destination probe carrier or directly into the AFM-device.
A method for automated unloading AFM-probes from a source probe carrier and loading the probes after being individually characterized into a destination probe carrier for use by an AFM-device or directly loading a probe into an AFM-device, wherein each probe of the AFM-probes comprises a cantilever and a tip, the method comprising:
- receiving a source probe carrier;
- characterizing a cantilever of individual probes received in the source probe carrier;
- characterizing a tip of individual probes received in the source probe carrier;
- transferring AFM-probes to a destination probe carrier or directly loading a probe into an AFM-device.
Dependencies are inferred from the claim text.