Multiple wavelength ellipsometer system and method of use

A multiple wavelength ellipsometer system, comprising:

• a polarization state generator, including:
• a plurality of solid state light sources;
• and
• a no moving parts polarimeter, including:
• a first polarimeter section with an aperture configured to receive an incident beam;
• a plurality of detectors configured to receive the incident beam and convert the incident beam into one or more detector signals, wherein the plurality of detectors are mounted in one plane;
• a second polarimeter section including a first partially reflecting optic oriented to partially reflect the incident beam on to a first detector of the plurality of detectors, and to transmit a first remaining incident beam;
• a third polarimeter section including a second partially reflecting optic oriented to partially reflect the incident beam on to a second detector of the plurality of detectors, and to transmit a second remaining incident beam;
• a fourth polarimeter section including a third partially reflecting optic oriented to partially reflect the incident beam on to a third detector of the plurality of detectors, and to transmit a third remaining incident beam;
• a fifth polarimeter section including a fourth partially reflecting optic oriented to partially reflect the incident beam on to a fourth detector of the plurality of detectors, and to transmit a fourth remaining incident beam;
• a sixth polarimeter section including a reflecting optic oriented to reflect the remaining incident beam on to a fifth detector of the plurality of detectors, wherein the fifth detector is a position sensitive detector;
• and
• at least one retarder element positioned in at least one of:
• between the second polarimeter section and the third polarimeter section, between the third polarimeter section and the fourth polarimeter section, or between the fourth polarimeter section and the fifth polarimeter section.