Gantry type stage
AssigneeViatron Technologies Inc.
InventorsHyoung June Kim, Byung Kuk Kim, Min Su Back, Kyu Won Lee, Gyoung Nam Kim, Kang Sik Nam
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AssigneeViatron Technologies Inc.
InventorsHyoung June Kim, Byung Kuk Kim, Min Su Back, Kyu Won Lee, Gyoung Nam Kim, Kang Sik Nam
Estimating the term…
The present disclosure discloses a gantry-type stage including a base frame having a base space formed on an inner upper side thereof; two first transfer modules, each of which comprising a first transfer block configured to be moved in a first direction, and being coupled to one side and the other side of the base frame, respectively; a second transfer module comprising a second transfer block configured to be moved in a second direction perpendicular to the first direction; third transfer modules, each of which comprising a third transfer block configured to be moved in a third direction perpendicular to the first and second directions; and a mounting module comprising a mounting block placed between the third transfer modules at a front side of the second transfer block and a mounting hinge coupled between both sides of the mounting block and the third transfer module.
A gantry-type stage, comprising:
Dependencies are inferred from the claim text.