Wet cleaning method for the door of foup
AssigneeAsia Neo Tech Industrial Co., Ltd.
InventorsPU-CHANG YEH, CHAO-MING CHENG
Life of this patent
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Abstract
A wet cleaning method for the door of FOUP, including placing the door horizontally, such that an inner surface of the door with an annular seal ring is exposed upward, and an outer surface of the door with a plurality of functional slots is exposed downward, and the inner surface of the door and the seal ring are flushed from top to bottom by the cleaning solution. Specifically, the cleaning path of the cleaning solution excludes passing through the outer surface and the functional slot holes, so as to prevent the cleaning solution from flowing into the inner compartment of the door and accumulating therein.
Claims18
A wet cleaning method for the door of a FOUP, wherein the FOUP comprises the door and a shell to be locked by the door, the door has an inner compartment, an outer surface exposed outside the shell, an inner surface located at the opposite side of the outer surface to be hidden inside the shell, and an end wall surrounding the outer surface and inner surface, the outer surface is formed with a plurality of functional slot holes communicating with the inner compartment, the inner surface is provided with an annular airtight seal ring for airtight connection with the shell, the end wall is provided with a plurality of ear holes communicating with the inner compartment, each of the ear holes is provided with a clamping ear protruding in and out for locking the shell, and the door is unlocked and separated from the shell before execution of the wet cleaning method, which includes:
- horizontally placing the door so that the inner surface with the annular airtight seal ring is exposed upward and the outer surface with the functional slot holes is exposed downward;
- and
- defining a door cleaning path from top to bottom and supplying cleaning solution to flush the inner surface and the airtight seal ring of the door along the door cleaning path.
- Specifically, the door cleaning path excludes passing through the outer surface and the functional slot holes, the door is placed on a pair of clamps to receive the flushing of the cleaning solution, and the clamps cover the clamping ears and the ear holes to prevent them from contacting the cleaning solution.
A wet cleaning method for the door of a FOUP, wherein the FOUP comprises the door and a shell to be locked by the door, the door has an outer surface exposed outside the shell, an inner surface located at the opposite side of the outer surface to be hidden inside the shell, the outer surface is formed with a plurality of functional slot holes, the inner surface is provided with an annular airtight seal ring for airtight connection with the shell, and the door is unlocked and separated from the shell before execution of the wet cleaning method, which includes:
- horizontally placing the door so that the inner surface with the annular airtight seal ring is exposed upward and the outer surface with the functional slot holes is exposed downward;
- and
- defining a door cleaning path from top to bottom and supplying cleaning solution to flush the inner surface and the airtight seal ring of the door along the door cleaning path;
- specifically, the door cleaning path excludes passing through the outer surface and the functional slot holes.
Dependencies are inferred from the claim text.