Substrate processing system and teaching method

A substrate processing system comprising:

• a transfer module;
• a first transfer apparatus installed in the transfer module and having a plurality of end effectors configured to respectively hold a plurality of substrates, the first transfer apparatus being configured to simultaneously transfer the plurality of substrates;
• and
• a control device including a processor and a memory coupled to the processor and storing a program for operating the substrate processing system, the processor configured to control each configuration of the substrate processing system by reading and executing the program from the memory, the control device configured to control an operation of the first transfer apparatus, wherein
• the control device controls
• (A) calculating a center-to-center distance between the plurality of substrates when the plurality of substrates are respectively held by the plurality of end effectors;
• and
• (B) adjusting a position when the plurality of substrates are held by the plurality of end effectors based on the center-to-center distance between the plurality of substrates calculated in the (A) and a design value of the center-to-center distance between the plurality of substrates.