Device and method for detecting the intensity of a plasma emission

Abstract

The disclosure relates to a method for detecting the intensity of an emission of a plasma which can be generated in a plasma-generating device. According to an implementation, received voltage signals of a photomultiplier are assigned to a respective duration within a period of a periodic signal of the plasma-generating device using at least one received synchronization signal. The disclosure additionally relates to an analysis unit for carrying out the aforementioned method and to a device for detecting the intensity of an emission of a plasma which can be generated in a plasma-generating device, including the plasma-generating device, a photomultiplier, a synchronization signal generator, and the aforementioned analysis unit.

Dependencies are inferred from the claim text.