Method of obtaining prediction model, information processing apparatus, article manufacturing method, and non-transitory computer-readable storage medium

An information processing apparatus comprising:

• a memory;
• and
• a CPU configured to perform a process of obtaining a prediction model f predicting fluctuation of imaging characteristics of a projection optical system which is used in an exposure apparatus that exposes a substrate via an original,
• wherein the process includes
• setting a first value, which is a value of a first coefficient in a first prediction model that is set based on a result of measuring fluctuation of imaging characteristics of a first projection optical system in a first exposure apparatus including the first projection optical system, as a value of the first coefficient in a second prediction model for predicting fluctuation of imaging characteristics of a second projection optical system in a second exposure apparatus including the second projection optical system, while temporarily setting a value of a second coefficient in the second prediction model to a default value,
• acquiring a measurement value by measuring fluctuation of imaging characteristics of the second projection optical system while performing correction based on a prediction value which is obtained by predicting fluctuation of imaging characteristics of the second projection optical system using the second prediction model set in the setting, and
• setting a value of the second coefficient in the second prediction model to second value, which is a value of the second coefficient in the second prediction model, obtained based on a measurement value acquired in the acquiring, and
• the second exposure apparatus is an apparatus of the same type as the first exposure apparatus.