Actinic ray-sensitive or radiation-sensitive resin composition, resist film, pattern forming method, and method for producing electronic device

An actinic ray-sensitive or radiation-sensitive resin composition comprising a resin (X) having a repeating unit (u1), and a solvent,

• wherein the repeating unit (u1) includes at least one cation selected from the group consisting of a cation represented by the following formula (CT-1) and a cation represented by the following formula (CT-2), and an anion bonded to a molecular chain of the resin (X),
• a content of the repeating unit (u1) relative to a total content of resins contained in the actinic ray-sensitive or radiation-sensitive resin composition is 40 mass % or more,
• wherein, in the formula (CT-1) and the formula (CT-2),
• R3 and R4 each independently represent an organic group, a hydroxy group, a mercapto group, an amino group, a nitro group, a phosphino group, a silyl group, or a halogen atom;
• when a plurality of R3 are present, the plurality of R3 may be bonded together, directly by a single bond or via a linking group, to form a ring;
• when a plurality of R4 are present, the plurality of R4 may be bonded together, directly by a single bond or via a linking group, to form a ring,
• R5 and R6 each independently represent an alkyl group, a cycloalkyl group, an alkenyl group, a cycloalkenyl group, an aryl group, or a heteroaryl group;
• when R5 and R6 include a methylene group, at least one of the methylene groups may be substituted with a divalent heteroatom-containing group;
• R5 and R6 may be bonded together, directly by a single bond or via any one selected from the group consisting of an oxygen atom, a sulfur atom, and an alkylene group, to form a ring,
• R7 represents a hydrogen atom, an alkyl group, a cycloalkyl group, an alkenyl group, a cycloalkenyl group, an aryl group, or a heteroaryl group,
• R8 and R9 each independently represent a hydrogen atom, an organic group, a hydroxy group, a mercapto group, an amino group, a nitro group, a phosphino group, a silyl group, or a halogen atom, or R8 and R9 are bonded together to represent a single bond or a divalent linking group,
• R10 and R11 each independently represent an alkyl group, a cycloalkyl group, an alkenyl group, a cycloalkenyl group, an aryl group, or a heteroaryl group;
• when R10 and R11 include a methylene group, at least one of the methylene groups may be substituted with a divalent heteroatom-containing group;
• R10 and R11 may be bonded together, directly by a single bond or via any one selected from the group consisting of an oxygen atom, a sulfur atom, and an alkylene group, to form a ring,
• Y1, Y2, Y3, and Y4 each independently represent an oxygen atom or a sulfur atom,
• L1 represents an alkylene group, a cycloalkylene group, an alkenylene group, a cycloalkenylene group, an arylene group, a heteroarylene group, a linking group in which at least two groups selected from the group consisting of an alkylene group, a cycloalkylene group, an alkenylene group, a cycloalkenylene group, an arylene group, and a heteroarylene group are bonded together via at least one selected from the group consisting of a single bond, an oxygen atom, a sulfur atom, and a nitrogen atom-containing group, or a single bond,
• L2 and L3 each independently represent a single bond, an alkenylene group having 2 carbon atoms, an alkynylene group having 2 carbon atoms, a carbonyl group, a sulfinyl group, or a sulfonyl group,
• a and b each independently represent an integer of 1 to 3,
• when a represents 1, c represents an integer of 0 to 3,
• when a represents 2, c represents an integer of 0 to 5,
• when a represents 3, c represents an integer of 0 to 7,
• when b represents 1, d represents an integer of 0 to 4, provided that d+f is an integer of 0 to 4,
• when b represents 2, d represents an integer of 0 to 6, provided that d+f is an integer of 0 to 6,
• when b represents 3, d represents an integer of 0 to 8, provided that d+f is an integer of 0 to 8,
• e represents 0 or 1, f represents an integer of 0 to 4, provided that e+f is an integer of 1 to 4,
• in the formula (CT-1),
• R1 and R2 each independently represent an alkyl group, a cycloalkyl group, an alkenyl group, a cycloalkenyl group, an aryl group, or a heteroaryl group;
• when R1 and R2 include a methylene group, at least one of the methylene groups may be substituted with a divalent heteroatom-containing group,
• at least two of R1, R2, and the aromatic ring to which L1 is bonded may be bonded together, directly by a single bond or via any one selected from the group consisting of an oxygen atom, a sulfur atom, a nitrogen atom-containing group, and a methylene group, to form a ring,
• in the formula (CT-2),
• R12 represents an aryl group or a heteroaryl group, and
• R12 and the aromatic ring to which L1 is bonded may be bonded together, directly by a single bond or via any one selected from the group consisting of an oxygen atom, a sulfur atom, a nitrogen atom-containing group, and a methylene group, to form a ring.