Method for removing defect

A method for removing a defect, comprising:

• loading a mask into a chamber;
• acquiring information about the defect on a pattern structure of the mask;
• depositing a ferromagnetic material layer on the defect;
• removing the defect and the deposited ferromagnetic material layer from the mask using a defect transporter, the defect transporter including a defect collecting unit configured to generate a magnetic force;
• and
• moving the defect and the deposited ferromagnetic material layer to a collector.

A method for removing a defect, comprising:

• loading a target object into a chamber;
• acquiring information about a center position of the defect on the target object;
• converting an interior of the chamber into a vacuum state by pumping the interior of the chamber using a vacuum pump connected to the chamber;
• determining a deposition position of a ferromagnetic material layer by applying an offset distance in a horizontal direction from the center position of the defect;
• depositing the ferromagnetic material layer at the determined deposition position within the target object using a beam deposition device;
• removing the defect and the deposited ferromagnetic material layer from the target object using a defect transporter, the defect transporter configured to generate a magnetic force;
• and
• moving the defect and the deposited ferromagnetic material layer to a collector.