Sic single-crystal growth apparatus
AssigneeSec Carbon, Limited
InventorHiromu SHIOMI
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AssigneeSec Carbon, Limited
InventorHiromu SHIOMI
Estimating the term…
A method of growing an SiC single-crystal, including growing the SiC single-crystal using an SiC single-crystal growth apparatus including a heating vessel, and a heating member adapted to heat the heating vessel. The heating member includes a first heating sub-member having a first heating surface positioned outside of the heating vessel to cover an entire outer surface of the major surface portion, and a second heating sub-member having a second heating surface positioned outside of the heating vessel to cover an entire outer surface of the peripheral side portion. The apparatus satisfying the relationship B/A≥2, where A is a sectional area of the interior space and B is an area of the first heating surface. The growing of the SiC single-crystal is performed so that C is larger than D, where C is heating energy of the first heating sub-member and D is heating energy of the second heating sub-member.
A method of growing an SiC single-crystal, comprising growing an SiC single-crystal using an SiC single-crystal growth apparatus,
Dependencies are inferred from the claim text.