Electroplating apparatus

An electroplating apparatus comprising:

• a support plate;
• a moving plate disposed on the support plate;
• a cylinder coupled to the support plate, and having a piston connected to a lower surface of the moving plate to move the moving plate up and down;
• a fixing block coupled to the support plate so as to be horizontally spaced apart from the cylinder;
• a shaft coupled to the fixing block, and extending from the support plate toward the moving plate, a vertical axis of the shaft being parallel to a moving direction of the piston;
• a linear bushing coupled to a lower surface of the moving plate;
• and
• a guide hole vertically penetrating the moving plate and the linear bushing,
• wherein the shaft is inserted into the guide hole,
• wherein the fixing block has a recessed portion formed from an upper surface of the fixing block inward, and surrounding the shaft, and
• wherein, when the moving plate is lowered by the cylinder, the linear bushing is inserted into the recessed portion of the fixing block.

An electroplating apparatus comprising:

• a plating bath in which a plating solution is contained;
• and
• a substrate holder configured to hold a substrate so as to immerse the substrate in the plating solution,
• wherein the substrate holder includes:
• a moving plate;
• a support plate disposed under the moving plate;
• a cylinder coupled to the support plate, and having a piston connected to a lower surface of the moving plate to move the moving plate up and down;
• fixing blocks coupled to the support plate so as to be horizontally spaced apart from the cylinder;
• at least three shafts coupled to the fixing blocks, and coupled to an upper surface of the support plate so as to extend in a direction vertical to the upper surface of the support plate;
• and
• linear bushings coupled to a lower surface of the moving plate so as to vertically correspond to the shafts,
• wherein the shafts vertically penetrate the moving plate and the linear bushings,
• wherein the moving plate has a planar shape of a circular ring, and
• wherein the shafts are arranged along an edge of the moving plate.