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US 2026/0206539 A1Published application
Treating an electrostatic chuck pedestal
AssigneeLam Research Corporation
InventorsMahmoud VAHIDI, Sergey Georgiyevich BELOSTOTSKIY, Joel HOLLINGSWORTH, Karl Frederick LEESER, Ahmet KUCUK
Life of this patent
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Abstract
A method for laser treating an electrostatic chuck pedestal comprises selectively applying a laser beam to a substrate contact area of the electrostatic chuck pedestal to form a microstructurally modified layer on at least a portion of the substrate contact area.
Claims20
A method for laser treating an electrostatic chuck pedestal, the method comprising:
- selectively applying a laser beam to a substrate contact area of the electrostatic chuck pedestal to form a microstructurally modified layer on at least a portion of the substrate contact area.
A method, comprising:
- selectively applying a laser beam to at least a portion of a substrate-facing surface of an electrostatic chuck pedestal outside of one or more substrate contact areas of the substrate-facing surface of the electrostatic chuck pedestal to thereby form a microstructurally modified layer on at least the portion of the substrate-facing surface.
An electrostatic chuck pedestal comprising:
- a substrate-facing surface comprising a substrate contact area;
- and
- a microstructurally modified layer on at least a portion of the substrate contact area, wherein the microstructurally modified layer comprises a thickness of greater than or equal to 100 nm.
Dependencies are inferred from the claim text.