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US 2026/0205737 A1Published application
SegMEMS
AssigneeInfineon Technologies AG
InventorsClaudio Falco, Marc Füldner, Andreas Wiesbauer, Jose Luis Ceballos
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Abstract
A digital microphone includes a segmented microelectromechanical system (MEMS) device for generating a first signal having a first response to an ambient signal and for generating a second signal having a second response to the ambient signal; and a combination circuit for dynamically combining the first signal and the second signal to generate a combined output signal.
Claims20
A system comprising:
- a segmented microelectromechanical system (MEMS) device configured for generating a first signal having a first response to an ambient signal and for generating a second signal having a second response to the ambient signal;
- and
- a combination circuit configured for dynamically combining the first signal and the second signal to generate a combined output signal.
A microelectromechanical (MEMS) device comprising:
- a segmented membrane or backplate;
- and
- a support structure for supporting the segmented membrane or backplate, wherein the segmented membrane or backplate comprises a high signal-to-noise (SNR) region and a high acoustic overload point (AOP) region.
A method comprising:
- generating a first input signal comprising a high signal-to-noise (SNR) version of a single input signal;
- generating a second input signal comprising a high acoustic overload point (AOP) version of the single input signal, wherein the first input signal and the second input signal have different responses to the single input signal;
- dynamically combining the first input signal and the second input signal;
- and
- generating a combination output signal bounded by a first input signal response and a second input signal response.
2 more elements
Dependencies are inferred from the claim text.