Diffusion pump

Abstract

A diffusion pump 1 includes a casing 11; a jet body 12 which is installed inside the casing 11; an intake port 13 which is installed at an upper portion of the casing 11 and connected to a vacuum vessel; an exhaust port 14 which is installed at a lower portion of the casing 11; a working fluid reservoir 15 which is installed at a bottom portion of the casing 11 and stores a working fluid; a jet nozzle 17 which ejects vapor of the working fluid, which is heated by a heater and thereby evaporated, in a direction including a component in a direction toward the bottom portion of the casing 11; and a temperature adjustment pipe 18 which is installed to surround the casing 11. The working fluid is an alkali metal or a low-boiling-point liquid metal.

Dependencies are inferred from the claim text.