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US 2026/0203875 A1Published application
Apparatus and methods for generating denoising model
AssigneeASML Netherlands B.V.
InventorsHairong LEI, Wei FANG
Life of this patent
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Abstract
Described herein is a method for training a denoising model. The method includes obtaining a first set of simulated images based on design patterns. The simulated images may be clean and can be added with noise to generate noisy simulated images. The simulated clean and noisy images are used as training data to generate a denoising model.
Claims21
1-20. (canceled)
A non-transitory computer readable medium storing instructions that are executable by one or more processors of a system to cause the system to perform operations comprising:
- converting design patterns to a first set of simulated images;
- providing the first set of simulated images as an input to a base denoising model to obtain a second set of simulated images, the second set of simulated images being denoised images associated with the design patterns;
- and
- using reference denoised images as feedback to update one or more configurations of the base denoising model, wherein the one or more configurations are updated based on a comparison between the reference denoised images and the second set of simulated images.
1 more element
A system comprising:
- e-beam optics configured to capture an image of a patterned substrate;
- and one or more processors configured to execute instructions to cause the system to perform operations comprising:
- convert design patterns to a first set of simulated images;
- provide the first set of simulated images as an input to a base denoising model to obtain a second set of simulated images, the second set of simulated images being denoised images associated with the design patterns;
- and
- use reference denoised images as feedback to update one or more configurations of the base denoising model, wherein the one or more configurations are updated based on a comparison between the reference denoised images and the second set of simulated images.
3 more elements
Dependencies are inferred from the claim text.