Hybrid plasmonic electro-absorption modulators
AssigneeGlobalFoundries U.S. Inc.
InventorsYusheng Bian, Steven M. Shank, Judson R. Holt
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AssigneeGlobalFoundries U.S. Inc.
InventorsYusheng Bian, Steven M. Shank, Judson R. Holt
Estimating the term…
Structures for an electro-absorption modulator and methods of forming a structure for an electro-absorption modulator. The structure comprises a first metal layer and a second metal layer adjacent to the multiple-layer structure, a waveguide core, and a multiple-layer structure on a portion of the waveguide core. The multiple-layer structure comprises a first plurality of layers and a second plurality of layers that alternate with the first plurality of layers. The first plurality of layers comprise a first material, and the second plurality of layers comprise a second material. The multiple-layer structure is positioned in a lateral direction between the first metal layer and the second metal layer.
A structure for a hybrid plasmonic electro-absorption modulator, the structure comprising:
A method of forming a structure for a hybrid plasmonic electro-absorption modulator, the method comprising:
Dependencies are inferred from the claim text.