Enhanced ring resonator dual frequency comb spectroscopy gas sensor
OwnerChen FENG, Moin S SHAFAI +2inventors
InventorsChen FENG, Moin S SHAFAI, Andy Walker BROWN, Suresh VENKATARAYALU
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OwnerChen FENG, Moin S SHAFAI +2inventors
InventorsChen FENG, Moin S SHAFAI, Andy Walker BROWN, Suresh VENKATARAYALU
Estimating the term…
The present disclosure provides a photonic gas sensor chip comprising a substrate, a silicon oxide layer disposed on the substrate, a heating element disposed on the silicon oxide layer, a silicon oxide base disposed on the heating element, and a silicon nitride waveguide disposed on the silicon oxide base. The silicon nitride waveguide comprises an extended resonant ring waveguide comprising spiral waveguide sections. The spiral sections increase optical path length while maintaining compact footprint. The heating element enables thermal tuning of resonant frequency to match dual frequency comb spectroscopy repetition frequencies.
A photonic gas sensor chip comprising:
A photonic gas sensing device comprising:
A method of gas sensing using dual frequency comb spectroscopy, the method comprising:
Dependencies are inferred from the claim text.