Precisipon press apparatus

A precision press apparatus comprising:

• a pressing head;
• a main load cell mounted on an upper end of the pressing head and configured to measure a pressing force applied to an object by the pressing head;
• a Z-axis driving mechanism including a Z-axis moving stage connected to an upper end of the main load cell and configured to move along a vertical Z-axis, a Z-axis base configured to movably support the Z-axis moving stage along the Z-axis, and a Z-axis actuator configured to move the Z-axis moving stage along the Z-axis;
• a Y-axis driving mechanism including a Y-axis moving stage fixed to the Z-axis base and configured to move along a Y-axis on an XY horizontal plane, Y-axis fixed stages spaced outward from the Y-axis moving stage along the Y-axis, a gantry configured to connect the Y-axis fixed stages, a Y-axis auxiliary stage spaced upward from the Y-axis moving stage along the Z-axis, inner flexures connected between the Y-axis auxiliary stage and the Y-axis moving stage, outer flexures connected between the Y-axis auxiliary stage and the Y-axis fixed stages, and a Y-axis actuator configured to move the Y-axis moving stage along the Y-axis;
• and
• a load compensation mechanism configured to apply a force between the Z-axis base and the gantry, based on the pressing force measured by the main load cell, to cancel a vertical reaction force acting on the pressing head.