Control system for dynamic stepper motor
AssigneeApplied Materials, Inc.
InventorsSTEPHEN COOL, JOSHUA JONES, AUNG TOE, ERIC WELCH
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AssigneeApplied Materials, Inc.
InventorsSTEPHEN COOL, JOSHUA JONES, AUNG TOE, ERIC WELCH
Estimating the term…
Embodiments described herein relate to an apparatus that includes a stepper motor, a driver chip communicatively coupled to the stepper motor, an encoder communicatively coupled to the stepper motor, and a feedback controller communicatively coupled to the driver chip and the encoder. In an embodiment, the feedback controller includes a state space plant configured to receive a control signal and generate a vector including a position and velocity of the stepper motor. In an embodiment, the feedback controller further includes a pulse width modulation (PWM) converter configured to receive the vector and output a first PWM signal corresponding to a number of steps to drive the stepper motor and a second PWM signal corresponding to a direction of the number of steps of the stepper motor. In an embodiment, the feedback controller further includes a Luenberger observer configured to receive a feedback signal from the encoder.
An apparatus, comprising:
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Dependencies are inferred from the claim text.