US 2026/0194458 A1 · GAS GENERATOR WITH HIERARCHICAL SOURCES AND GETTERS

Abstract

A gas generator includes (i) a plurality of sources composed of a first material, the plurality of sources including a first source having a first source area and a second source having a second source area less than the first source area, (ii) a plurality of getters composed of a second material different from the first material, the plurality of getters including a first getter having a first getter area and a second getter having a second getter area less than the first getter area, and (iii) a substrate on which the plurality of sources and the plurality of getters are mounted such that none of the plurality of sources directly touch each other, none of the plurality of getters directly touch each other, and none of the plurality of sources directly touch the plurality of getters.

Claims20

Dependent claims

A gas generator, comprising:

a plurality of sources composed of a first material, the plurality of sources including a first source having a first source area and a second source having a second source area less than the first source area;
a plurality of getters composed of a second material different from the first material, the plurality of getters including a first getter having a first getter area and a second getter having a second getter area less than the first getter area;
and
a substrate on which the plurality of sources and the plurality of getters are mounted such that none of the plurality of sources directly touch each other, none of the plurality of getters directly touch each other, and none of the plurality of sources directly touch the plurality of getters.

1 more element

A method for generating a gas within a vacuum cell, comprising:

activating a first source of a plurality of sources located within the vacuum cell, the plurality of sources being composed of a first material, the first source having a first source area, wherein the first source, when activated, releases the gas from the first source into the vacuum cell having an initial pressure based on the first source area;
activating a first getter of a plurality of getters located within the vacuum cell, the plurality of getters being composed of a second material different from the first material, the first getter having a first getter area, wherein the first getter, when activated, removes a portion of the gas based on the first getter area such that the gas has a subsequent pressure that is less than the initial pressure;
and
activating a second source of the plurality of sources, the second source having a second source area less than the first source area, wherein said activating the second source releases, from the second source and adding to the gas in the vacuum cell, an additional gas based on the second source area such that the gas has a second subsequent pressure that is higher than the subsequent pressure.

1 more element

Dependencies are inferred from the claim text.

Gas generator with hierarchical sources and getters

Life of this patent

Gas generator with hierarchical sources and getters

Life of this patent

Abstract

Claims20