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US 2026/0194431 A1Published application
Method for inspecting a silicon carbide wafer
AssigneeLEAP Semiconductor Corp.
InventorsWen-Chung LI, Kai-Chi Hsiao
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Abstract
The present invention relates to a method for inspecting a silicon carbide wafer. This method discloses the structural composition of various layers within the silicon carbide wafer, comprising the subsurface damaged layer and the undamaged layer, by analyzing material information in a vertical cross-section. The invention could enable to classify wafer for facilitating further applications.
Claims12
A method for inspecting a silicon carbide wafer, comprising:
- providing a single-crystal silicon carbide test wafer at a room temperature;
- establishing a brittleness characteristic analysis standard and performing a test;
- affixing said single-crystal silicon carbide test wafer to an inclined plane of a wedge-shaped metal mold by using a wax-coating method;
- performing a chemical etching process by using a molten inorganic alkali solution and a carbonate solution;
- and
- retrieving said single-crystal silicon carbide test wafer and measuring a length L1 of a plurality of microcracks on said inclined plane of said wedge-shaped metal mold after said chemical etching process
3 more elements
A method for inspecting a silicon carbide wafer, comprising:
- performing a heat treatment process on a test single-crystal silicon carbide wafer in a high-temperature furnace;
- establishing a residual plastic deformation analysis standard under high-temperature ductility conditions, following by a test;
- attaching said single-crystal silicon carbide test wafer to an inclined surface of a wedge-shaped metal mold by using a wax-coating method;
- preparing a molten inorganic alkali liquid and performing a chemical etching process;
- and
- retrieving said single-crystal silicon carbide test wafer and measuring a distance L2 between a plurality of dislocation etching pits on said inclined plane of said wedge-shaped metal mold and a polishing interface of said single crystal silicon carbide test wafer after said chemical etching process.
3 more elements
Dependencies are inferred from the claim text.