Manufacturing equipment for light-emitting device

A manufacturing equipment for a light-emitting device, comprising:

• a load chamber;
• a first etching apparatus;
• a plasma treatment apparatus;
• a standby chamber;
• a deposition apparatus;
• a second etching apparatus;
• an unload chamber;
• and
• a transfer chamber comprising a carrying device,
• wherein the carrying device is configured to transfer an object to be processed between the load chamber, the first etching apparatus, the plasma treatment apparatus, the standby chamber, the deposition apparatus, the second etching apparatus, and the unload chamber,
• wherein the object to be processed comprises at least a substrate and an organic compound film over the substrate, and
• wherein the object to be processed is carried to the first etching apparatus, the plasma treatment apparatus, the standby chamber, the deposition apparatus, and the second etching apparatus in this order.

A manufacturing equipment for a light-emitting device, comprising:

• a load chamber;
• a first etching apparatus;
• a plasma treatment apparatus;
• a standby chamber;
• a deposition apparatus;
• a second etching apparatus;
• an unload chamber;
• and
• a transfer chamber comprising a carrying device,
• wherein the carrying device is configured to transfer an object to be processed between the load chamber, the first etching apparatus, the plasma treatment apparatus, the standby chamber, the deposition apparatus, the second etching apparatus, and the unload chamber,
• wherein the object to be processed comprises at least a substrate and an organic compound film over the substrate, and
• wherein the manufacturing equipment is configured to process the organic compound film into an island-shaped organic compound layer.