Inkjet printing head, inkjet printing device including the same, and method for manufacturing the inkjet printing head

An inkjet printing device comprising:

• a stage for mounting a substrate;
• a head unit disposed on the stage and configured to supply ink;
• and
• a nozzle unit disposed adjacent to the head unit and forming a first passageway configured to eject the ink on the substrate and a second passageway extended to the first passageway defined therein, the nozzle unit comprising:
• a base layer comprising a first portion adjacent to the second passageway and a second portion extending from the first portion;
• a supplementary part disposed below the base layer and overlapping with the first portion;
• a metal oxide layer disposed below the base layer and overlapping with the second portion;
• and
• a first metallic film disposed below the supplementary part and the metal oxide layer.

A manufacturing method for an inkjet printing head, the manufacturing method comprising:

• preparing a damaged inkjet printing head comprising a head unit and a nozzle unit disposed adjacent to the head unit, the nozzle unit comprising a base layer having an opening area defined therein and a metal oxide layer disposed below a portion of the base layer;
• forming a shield unit by applying a material comprising a monomer to the opening area and another portion of the base layer and pre-curing the applied material;
• etching the shield unit for etching some of the applied material;
• forming a passageway for introducing a cleaning solution through the opening area and removing a portion of the shield unit disposed in the opening area;
• forming a first metallic film below the metal oxide layer;
• forming a second metallic film below the first metallic film;
• and
• forming a monomolecular film below the second metallic film.