Contact structure and semiconductor memory device including the same
AssigneeSamsung Electronics Co., Ltd.
InventorsTaehyoung IM, Minkyu SUH, Gyeongho KANG, Sang-Kuk KIM, Hyunchul YOON, Jinkwan LEE
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AssigneeSamsung Electronics Co., Ltd.
InventorsTaehyoung IM, Minkyu SUH, Gyeongho KANG, Sang-Kuk KIM, Hyunchul YOON, Jinkwan LEE
Estimating the term…
A contact structure includes a contact insulation layer defining a preliminary contact hole, a first insulating spacer extending along a side of the preliminary contact hole, a second insulating spacer provided on an upper side surface of the first insulating spacer, and a contact filling a contact hole defined by the first insulating spacer and the second insulating spacer. Each of the contact provided on a bottom surface of the second insulating spacer and the contact provided on a side surface of the second insulating spacer has a width that increases in a direction from a bottom surface of the contact toward an upper surface thereof. A maximum width of the contact provided on the bottom surface of the second insulating spacer is greater than a minimum width of the contact provided on the side surface of the second insulating spacer.
A contact structure comprising:
A contact structure comprising:
A semiconductor memory device comprising:
Dependencies are inferred from the claim text.