High power generator, pulsing arrangement, and method of supplying a plasma process with high power pulses

A high-power-generator (HP-generator) configured to deliver high power with a high value of voltage and/or high current value to a pulsing unit, wherein the pulsing unit is configured to deliver pulsed high power with a high value of voltage and/or high current with pulse-high-duration of 10 μs or less and pulse-low-duration of 10 μs or less to a capacitive load, in particular to a plasma process, the HP-generator comprising:

• a control input, configured to be connected to a control signal from an external pulsing control, wherein the pulsing control also controls a pulse-high-duration and a pulse-low-duration of the pulsing unit;
• a plurality of low-power-generators (LP-generators), wherein at least one of the plurality of LP-generators is adjustable in voltage and/or current;
• and
• a control unit configured to control an output of the HP-generator responsive to a signal at the control input in a way that the output voltage and/or current of the HP-generator can be changed by switching a switch which bypasses an LP-generator of the plurality of LP-generators which is adjustable in voltage and/or current.