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US 2026/0183883 A1Published application
Electrostatic chuck with a light heating structure
AssigneeVM Inc.
InventorsHwi Gon JANG, Woo Hyung CHOI, Sung Kyun JUNG, Sung Hwan PARK, Jin Myeong LEE
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Abstract
Provided is an electrostatic chuck with a light heating structure. The electrostatic chuck with a light heating structure comprises a body block 11; a dielectric layer 12 coupled to an upper surface of the body block 11; a heater 13 for heating the dielectric layer 12; and a light emitting module 14 for inducing a light to a lower surface of the dielectric layer 12 and heating the dielectric layer 12.
Claims9
An electrostatic chuck with a light heating structure comprising:
- a body block;
- a dielectric layer coupled to an upper surface of the body block;
- a heater for heating the dielectric layer;
- and
- a light emitting module for inducing a light to a lower surface of the dielectric layer and heating the dielectric layer.
2 more elements
Dependencies are inferred from the claim text.