Laser drilling system and method for selective removal of insulating layers

Abstract

The embodiment relates to a laser drilling system and a method for selectively removing an insulating layer, and comprises: a workpiece including a metal layer and an insulating layer disposed on the metal layer; a stage on which the workpiece is placed; an optical delivery system disposed on the stage and configured to deliver laser light to the insulating layer; a laser beam generator connected to the optical delivery system and configured to output laser light; a blowing-suction device disposed between the workpiece and the optical delivery system; a monitoring-inspection device configured to inspect the surface shape of the workpiece; and a control unit configured to control the laser light generated by the laser beam generator and/or the optical delivery system based on the surface shape information, wherein the optical delivery system controls the laser light by means of a diffractive optical system.

Dependencies are inferred from the claim text.