Semiconductor structure, manufacturing method therefor, and electronic device
AssigneeHuawei Technologies Co., Ltd.
InventorsHeng Li, Jinwen Dong, Jifeng Zhu
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AssigneeHuawei Technologies Co., Ltd.
InventorsHeng Li, Jinwen Dong, Jifeng Zhu
Estimating the term…
The invention discloses a semiconductor structure, including a substrate, a dielectric layer, a protective layer, and a conductive pillar. The dielectric layer is stacked on the substrate. There is a via that passes through the dielectric layer and the substrate in a direction from the dielectric layer to the substrate. The via includes a first portion formed within the substrate. The protective layer covers a part of an inner wall that is of the first portion and that is close to the dielectric layer. The conductive pillar is disposed in the via, and is electrically connected to an electronic component on the dielectric layer.
A semiconductor structure, comprising:
A manufacturing method for a semiconductor structure, comprising:
Dependencies are inferred from the claim text.