Filter module
AssigneeEntegris, Inc.
InventorsMatthew A. Fuller, Colton J. Harr
Life of this patent
Estimating the term…
Abstract
A filter module includes an interface body and a filter retention body. A filter can be disposed between the filter retention body and a filter retainer joined to the filter retention body. The filter retention body can further include a valve. The filter retainer can be joined to the filter retention body by a snap fit, a press-fit, or a weld. The filter retainer can include stand-offs configured to contact the filter such that the filter is held away from the filter grill. The filter module can be used for providing purge in a wafer container such as a front opening unified pod (FOUP).
Claims20
A gas exchange module for a substrate container, comprising:
- a filter housing;
- an interface body including a bore configured to receive the filter housing;
- a filter retainer joined to the filter housing.
A method of providing gas exchange in a substrate container, comprising:
- assembling a gas exchange module by inserting filter housing into a bore of an interface body, positioning a filter between the filter housing and a filter retainer, and attaching the filter retainer to the filter housing;
- and
- inserting the gas exchange module into a gas exchange port of a substrate container.
Dependencies are inferred from the claim text.