Back to results
US 2026/0182293 A1Published application
Sealing structure, pressure container and sealing method
AssigneeTokyo Electron Limited
InventorsChun Hung HUNG, Chun Hung HUNG, Toru ISHII, Reita IGARASHI, Cheng Hsiung LEE, Fu Chieh HSU, Chi Ming KUO
Life of this patent
Estimating the term…
Abstract
A sealing structure is provided. The sealing structure includes a first portion and a second portion. The first portion defines a first groove opening toward a first direction. The second portion defines a second groove opening toward a second direction opposite to the first direction. The first portion surrounds the second portion.
Claims20
A sealing structure, comprising:
- a first portion defining a first groove opening toward a first direction;
- and
- a second portion defining a second groove opening toward a second direction opposite to the first direction, wherein the first portion surrounds the second portion.
A pressure container, comprising:
- an outer chamber defining a first cavity, wherein the outer chamber includes a first fixing portion;
- an inner chamber disposed in the first cavity and defining a second cavity, wherein the inner chamber includes a second fixing portion;
- and
- a sealing structure disposed adjacent to a gap between the first fixing portion and the second fixing portion, and configured to seal the gap between the first fixing portion and the second fixing portion, wherein the sealing structure comprises:
- a first portion defining a first groove opening toward a first direction;
- and
- a second portion defining a second groove opening toward a second direction opposite to the first direction, wherein the first portion surrounds the second portion.
4 more elements
Dependencies are inferred from the claim text.