Frequency variation reduction for electroacoustic devices
AssigneeRF360 Singapore Pte. Ltd.
InventorsMichael MIRBACH, Ghislain Michel RUPP
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Abstract
Techniques and apparatus for designing and fabricating an electroacoustic device. One example method of fabricating an electroacoustic device generally includes forming a layer stack and forming an electrode structure above the layer stack. Forming the layer stack may include forming at least a portion of the layer stack with a thickness based on a positive slope of a function of a metallization ratio of the electrode structure versus the thickness of the at least the portion of the layer stack.
Claims15
A method of fabricating an electroacoustic device, the method comprising:
- forming a layer stack;
- and
- forming an electrode structure above the layer stack, wherein forming the layer stack comprises forming at least a portion of the layer stack with a thickness based on a positive slope of a function of a metallization ratio of the electrode structure versus the thickness of the at least the portion of the layer stack.
An electroacoustic device comprising:
- a layer stack comprising a piezoelectric layer disposed above a substrate;
- and
- an electrode structure disposed above the layer stack, wherein a thickness of at least a portion of the layer stack is associated with a positive slope of a function of a metallization ratio of the electrode structure versus the thickness of the at least the portion of the layer stack.
Dependencies are inferred from the claim text.