Mems controller and mems device

A Micro-Electro-Mechanical System (MEMS) controller, comprising:

• at least one control unit, wherein the at least one control unit comprises:
• two first anchor structures, a first gap being formed between two adjacent first anchor structures, and each of the two first anchor structures comprising a bottom surface and a top surface opposite to each other;
• two cantilever beam structures respectively corresponding to the two first anchor structures, each of the two cantilever beam structures comprising a first end and a second end opposite to each other, the first end of each of the two cantilever beam structures being located at the top surface of the first anchor structure corresponding thereto, and a second gap being formed between the second ends of the two cantilever beam structures;
• two second anchor point structures, one second anchor point structure of the two second anchor point structures being in contact with one of the two first anchor structures, and the other one of the two second anchor point structures being located at a side of the one second anchor point structure away from the two first anchor structures;
• and
• a diaphragm covering top surfaces of the two second anchor point structures;
• and
• an encapsulation structure comprising a bottom plate, a side plate and a top plate connected in sequence, the bottom plate directly facing the top plate, and the side plate connecting the bottom plate and the top plate,
• wherein the bottom plate is located at the bottom surfaces of the two first anchor structures and the bottom surfaces of the two second anchor point structures, the bottom plate is provided with a first flow channel port penetrating through the bottom plate, the first flow channel port corresponds to the control unit, the first flow channel port is in communication with the first gap of the control unit corresponding thereto, the top plate is spaced apart from top surfaces of the two cantilever beam structures and the diaphragm, the top plate is provided with a second flow channel port penetrating through the top plate, and the second flow channel port corresponds to the control unit.