Angle-Actuated Capacitive Sensor for Accurate Angled Deposition or Etch Process Monitoring

Abstract

A workpiece processing system that creates a ribbon beam at an extraction angle is disclosed. The ribbon beam may include ions, radicals or excited neutrals. The apparatus also includes an angle actuated sensor that is used to measure attributes of the ribbon beam in situ. The angle actuated sensor may be disposed in a location that is aligned with the workpiece so as to be the same distance from the extraction plate as the workpiece, such as on the workpiece holder or on a movable arm. This angle actuated sensor may be rotated so as to measure the amount of particles that are deposited or etched at a plurality of angles. Based on the data collected by the angle actuated sensor, the angle of the beam, the angular spread of the angled beam and the amount of material that is deposited or etched may be determined.

Dependencies are inferred from the claim text.