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US 2026/0177911 A1Published application
Organic salt, resist composition including the same, and pattern formation method using the resist composition
AssigneeSamsung Electronics Co., Ltd.
InventorsAram JEON, Minsang KIM, Kyuhyun IM, Kyuhwan KIM, Sunghwan PARK, Jungkyun OH, Won Joon CHO
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Abstract
Provided are an organic salt represented by Formula 1, a resist composition including the same, and a pattern formation method using the resist composition: For descriptions of A11, k11, L11, L12, A11, a12, R11, R12, b11, n11 and M+ in Formula 1, reference should be made to the specification.
Claims20
An organic salt represented by Formula 1:
- wherein, in Formula 1,
- A11 is a linear or cyclic C1-C30 hydrocarbon group optionally including a heteroatom,
- k11 is selected from integers of 1 to 4,
- L11 and L12 are each independently:
- a single bond;
- O;
- S;
- C(═O);
- C(═O)O;
- OC(═O);
- C(═O)NR12;
- NR12C(═O);
- S(═O);
- S(═O)2;
- S(═O)2O;
- OS(═O)2;
- or a linear, branched or cyclic C1-C30 divalent hydrocarbon group optionally including a heteroatom,
- a11 and a12 are each independently selected from integers of 0 to 4,
- R11 and R12 are each independently hydrogen, deuterium, a halogen atom, a cyano group, a hydroxyl group, or a linear, branched or cyclic C1-C20 monovalent hydrocarbon group optionally including a heteroatom,
- b11 is selected from integers of 0 to 10,
- any two adjacent groups among R11, L11 and L12 are optionally bonded to each other to form a ring,
- any two adjacent groups among a plurality of R11 groups are optionally bonded to each other to form a ring,
- n11 is selected from integers of 1 to 5, and
- M+ is a counter cation.
21 more elements
Dependencies are inferred from the claim text.