Inspection system and control system for rejecting disturbances and attenuating disturbance-induced errors therein

Abstract

An inspection system configured to scan a sample is provided. The inspection system comprises a scanning arrangement configured to image one or more physical parameters of the sample, a stage configured to maintain the sample in a suitable position relative to the scanning arrangement during operation thereof, one or more actuators configured to effect relative motion between the sample and the scanning arrangement, a system controller configured to direct operation of the inspection system, and a feedback controller configured to attenuate disturbances arising from relative-motion-induced disturbances. The feedback controller is a non-minimum phase controller, with one or more of its zeros being in the right-half plane.

Dependencies are inferred from the claim text.