Measuring head, and rocking fulcrum member used therein

Abstract

A measuring head 80 includes a rocking fulcrum member configured to support an arm member 83 having a tip end to which a contactor 85 is attached, the measuring head 80 detecting an amount of movement of the contactor 85 by detecting an amount of movement of the arm member 83 making a seesaw motion, in which the rocking fulcrum member is configured as a cross-shaped spring 10 with a cross-shaped thin plate part 10-1, the cross-shaped spring 10 having a hole to penetrate a center part 10-3 of the cross-shaped spring 10. With the measuring head, the same deformation can be obtained in a measuring direction with a smaller load, the torsional load in the other direction has sufficient rigidity, the fulcrum center is not shifted, and the repetition accuracy is improved.

Dependencies are inferred from the claim text.