Porous media evaporator
AssigneeApplied Materials, Inc.
InventorsTerry Bluck, David Masayuki Ishikawa, Kenneth Moyers, Prasanna Kalleshwara Buddappa Ramachandrappa, Sambhu Kundu, Visweswaren Sivaramakrishnan
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AssigneeApplied Materials, Inc.
InventorsTerry Bluck, David Masayuki Ishikawa, Kenneth Moyers, Prasanna Kalleshwara Buddappa Ramachandrappa, Sambhu Kundu, Visweswaren Sivaramakrishnan
Estimating the term…
A method and apparatus for an evaporator assembly are provided. The evaporator assembly includes an evaporator body, a coating basin, and a porous media. The evaporator body includes an evaporator sidewall, an evaporator volume defined by the evaporator sidewall, and an opening defined by the evaporator sidewall. The coating material basin includes a basin sidewall, a coating material volume defined by the basin sidewall, and a coating material bath disposed in the coating material volume. The porous media is partially disposed in the coating material bath and partially disposed within the evaporator volume.
An evaporator assembly, comprising:
An evaporation system, comprising:
A method of coating a substrate, comprising:
Dependencies are inferred from the claim text.