Non-Spherical Colloidal Silica, Preparation Method and Use thereof

Abstract

Provided is a non-spherical colloidal silica, a preparation method and use thereof. The non-spherical colloidal silica has a particle size of 35-150 nm and an aspect ratio of 1.5-2.5. The preparation method includes: 1) adding a first mixture including a first organic solvent, a base, and water to a second mixture including an alkoxysilane and a second organic solvent to react to obtain non-spherical silica nuclei; 2) using the non-spherical silica nuclei as a primary mother liquor, adding water, a base, and alkoxysilane in at least one step to perform at least one step of particle growth, obtaining an organic solution of non-spherical colloidal silica; 3) replacing the organic solvent in the organic solution of non-spherical colloidal silica with an equal volume of water. The non-spherical colloidal silica exhibits a higher polishing rate while maintaining surface quality during polishing and has extremely low total metal impurity content.

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