Precision System and Assembling Method Thereof
AssigneeBrightest Technology Taiwan Co., Ltd.
InventorsJie Zhang, Kuo-Feng Tseng, Zhonghua Dong
Life of this patent
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Abstract
A precision system includes a chamber and an enclosure. The chamber includes a first wall and a second wall to create a first accommodation space. At least one precision part is mounted on the first wall inside the first accommodation space. The enclosure and the chamber are assembled to create a second accommodation space. The second accommodation space between the enclosure and the first wall connects to the first accommodation space. Deformation of the first wall is substantially less than deformation of the second wall or the enclosure after pressure in the first accommodation space becomes different from pressure outside the precision system.
Claims20
A precision system, comprising:
- a chamber, comprising a first wall and a second wall to create a first accommodation space, wherein at least one precision part is mounted, or is to be mounted, on the first wall inside the first accommodation space;
- and
- an enclosure, wherein the enclosure and the chamber are assembled, or are to be assembled, to create a second accommodation space;
- wherein the second accommodation space between the enclosure and the first wall connects to the first accommodation space;
- wherein deformation of the first wall is substantially less than deformation of the second wall or the enclosure after pressure in the first accommodation space becomes different from pressure outside the precision system.
An assembling method, for a precision system, comprising:
- mounting at least one precision part on a first wall inside a chamber, wherein the chamber comprises the first wall and a second wall to create a first accommodation space;
- and
- assembling an enclosure and the chamber of the precision system to create a second accommodation space;
- wherein the second accommodation space between the enclosure and the first wall connects to the first accommodation space;
- wherein deformation of the first wall is substantially less than deformation of the second wall or the enclosure after pressure in the first accommodation space becomes different from pressure outside the precision system.
Dependencies are inferred from the claim text.